Operating Principle | Photoionization Detection (PID)
Photoionization Detection
PID Photoionization Detection Technology Overview
The AST1000 PID Intelligent Fixed Gas Detector is a high-performance gas detector designed specifically for the semiconductor industry and other general industrial environments, featuringPhotoionization Detection (PID), for detecting toxic gases, combustible gases, and environmental gases.
Product Features
Built-in multi-level security
Level 1 and Level 2 alarm & fault relays for comprehensive safety protection
Extend shelf life
Includes a 2-year extended warranty to reduce maintenance costs.
Dual LCD Display
Main screen 2.8 + Secondary screen 0.9: Clear, intuitive dashboard-style interface
Power over Ethernet (PoE)
Supports PoE for simplified cabling and reduced installation costs
1. Core Working Principle
PID has been usedUV Light SourceIonize organic compounds into detectable positive and negative ions. The resulting molecular fragments and electrons, carrying opposite charges, generate a current between two electrodes.
The detector amplifies the current and displays it."PPB/PPM"Concentration value. After detection, ions recombine into the original gas and vapor for non-destructive testing.
II. Product Appearance and Dimensions
AST1000 PID Gas Detector
4R-compatible sensor size
Host Technical Specifications
| Detector size | 115mm(H) x 65mm(W) x 150mm(D) |
| Detector Weight | 0.9kg |
| Operating Voltage | 24V DC nominal +/- 10% |
| Power over Ethernet | 36-57 VDC (via PoE), 48V DC nominal |
| Power consumption | ~ 5.0 W |
| Operating Temperature | 0-40℃ |
| LCD | Main LCD 240x320 2.8" TFT, Secondary LCD 80x160 0.9" TFT |
| Audible and visual alarm | Four LED status indicators, 1 buzzer(s) 85dB@10cm |
| Relay | 3 (Alert 1, Alert 2, Fault), 1.0A@30VDC or 0.5A@125VAC |
| Communication Standards | Modbus/TCP, Ethernet/PoE; optional LonWorks® |
| Certification Specifications | CE, IEC 61010-1, CPA, EN50270 |
| Traffic | 500 mL/min |
| Sampling Distance | Maximum 30 meters |
| Connect gas line | ¼" Teflon Tube |
III. Gas Type to Detect
AST InteliCal® Smart Sensor Module supports detection of multiple semiconductor process gases:
| Gas Name | Molecular Formula | Range | Sensor Type |
|---|---|---|---|
| Trimethylsilane | Si(CH₃)₃H (TMS) | 0-15 ppm | 4R Compatible |
| Triethyl phosphate | TEPO | 0-2 ppm | 4R Compatible |
| Triethylborane | TEB | 0-1000 ppm | 4R Compatible |
| Trimethylaluminum | TMA | 0-15 ppm | 4R Compatible |
| Trimethylsilylamine | TSA | 0-15 ppm | 4R Compatible |
| diisopropylaminosilane | LTO520 | 0-15 ppm | 4R Compatible |
| Titanium(IV) trimethoxy pentamethylcyclopentadienyl | NxTi | 0-2000 ppm | 4R Compatible |
| Zirconium acetate | ZAC | 0-15 ppm | 4R Compatible |
| Germanium tetrafluoride | GeF₄ | 0-1.5 ppm | 4R Compatible |
| Titanium(IV) dimethylamino | TDMAT | 0-15 ppm | 4R Compatible |
| Tetrakis(dimethylamino)hafnium | TDMAH | 0-15 ppm | 4R Compatible |
For more gas options, please contact Sensirion.